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미세분광기를 이용한 교류형 플라즈마 패널에서 보호막의 식각률 측정
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Advisor
김상열
Affiliation
아주대학교 일반대학원
Department
일반대학원 분자과학기술학과
Publication Year
2003
Publisher
The Graduate School, Ajou University
Description
학위논문(석사)--아주대학교 대학원 :분자과학기술학과,2003
Language
kor
URI
https://aurora.ajou.ac.kr/handle/2018.oak/7329
Journal URL
http://dcoll.ajou.ac.kr:9080/dcollection/jsp/common/DcLoOrgPer.jsp?sItemId=000000005134
Type
Thesis
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