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A SYSTEMATIC WAY OF VIBRATION REDUCTION FOR A SEMICONDICTOR INSPECTION EQUIPMENT

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Publication Year
2023-01-01
Journal
Proceedings - ASPE 2023 Annual Meeting
Publisher
American Society for Precision Engineering, ASPE
Citation
Proceedings - ASPE 2023 Annual Meeting, pp.318-321
All Science Classification Codes (ASJC)
Geochemistry and Petrology
Language
eng
URI
https://aurora.ajou.ac.kr/handle/2018.oak/37013
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85193751340&origin=inward
DOI
https://doi.org/2-s2.0-85193751340
Type
Conference
Funding
This work was supported by the Technology development Program(S3273805) funded by the Ministry of SMEs and Startups(MSS, Korea)
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Jeon, Yongho Image
Jeon, Yongho 전용호
Department of Mechanical Engineering
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