Citation Export
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yu, Seung Ha | - |
| dc.contributor.author | Jeon, Yong Ho | - |
| dc.contributor.author | Choi, Young Man | - |
| dc.contributor.author | Lee, Moon Gu | - |
| dc.date.issued | 2023-01-01 | - |
| dc.identifier.uri | https://aurora.ajou.ac.kr/handle/2018.oak/37013 | - |
| dc.identifier.uri | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85193751340&origin=inward | - |
| dc.description.sponsorship | This work was supported by the Technology development Program(S3273805) funded by the Ministry of SMEs and Startups(MSS, Korea) | - |
| dc.language.iso | eng | - |
| dc.publisher | American Society for Precision Engineering, ASPE | - |
| dc.title | A SYSTEMATIC WAY OF VIBRATION REDUCTION FOR A SEMICONDICTOR INSPECTION EQUIPMENT | - |
| dc.type | Conference | - |
| dc.citation.conferenceDate | 2023.11.12. ~ 2023.11.17. | - |
| dc.citation.conferenceName | 38th Annual Meeting of the American Society for Precision Engineering, ASPE 2023 | - |
| dc.citation.edition | Proceedings - ASPE 2023 Annual Meeting | - |
| dc.citation.endPage | 321 | - |
| dc.citation.startPage | 318 | - |
| dc.citation.title | Proceedings - ASPE 2023 Annual Meeting | - |
| dc.identifier.bibliographicCitation | Proceedings - ASPE 2023 Annual Meeting, pp.318-321 | - |
| dc.identifier.doi | 2-s2.0-85193751340 | - |
| dc.identifier.scopusid | 2-s2.0-85193751340 | - |
| dc.type.other | Conference Paper | - |
| dc.subject.subarea | Geochemistry and Petrology | - |
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