Multi-degree-of-freedom ultra-precision force sensors are widely used in industrial applications such as biomedicine, precision chemistry, semiconductor manufacturing and so forth [1]. Among force measurement methods, the electromagnetic force compensation principle is the state-of-art, which has high resolution and good repeatability down to μN. This paper proposes a novel six degrees-of-freedom electromagnetic force compensation force-torque sensor based on crab-leg compliant mechanism and voice coil motors.
This work was supported by the Technology Innovation Program, No. 20014812, funded by the Ministry of Trade, Industry & Energy (MOTIE, Republic of Korea).
