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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Bae, Yeeun | - |
| dc.contributor.author | Yoon, Kyung Taek | - |
| dc.contributor.author | Lim, Hyunho | - |
| dc.contributor.author | Choi, Young Man | - |
| dc.date.issued | 2023-01-01 | - |
| dc.identifier.uri | https://aurora.ajou.ac.kr/handle/2018.oak/36911 | - |
| dc.identifier.uri | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85193685520&origin=inward | - |
| dc.description.abstract | Multi-degree-of-freedom ultra-precision force sensors are widely used in industrial applications such as biomedicine, precision chemistry, semiconductor manufacturing and so forth [1]. Among force measurement methods, the electromagnetic force compensation principle is the state-of-art, which has high resolution and good repeatability down to μN. This paper proposes a novel six degrees-of-freedom electromagnetic force compensation force-torque sensor based on crab-leg compliant mechanism and voice coil motors. | - |
| dc.description.sponsorship | This work was supported by the Technology Innovation Program, No. 20014812, funded by the Ministry of Trade, Industry & Energy (MOTIE, Republic of Korea). | - |
| dc.language.iso | eng | - |
| dc.publisher | American Society for Precision Engineering, ASPE | - |
| dc.subject.mesh | 6 degree of freedom | - |
| dc.subject.mesh | Electromagnetic force compensations | - |
| dc.subject.mesh | Force-measurement method | - |
| dc.subject.mesh | Force/torque sensor | - |
| dc.subject.mesh | High resolution | - |
| dc.subject.mesh | Multi degree-of-freedom | - |
| dc.subject.mesh | Semiconductor manufacturing | - |
| dc.subject.mesh | Six degrees of freedom | - |
| dc.subject.mesh | Ultra precision | - |
| dc.subject.mesh | Voice coil motors | - |
| dc.title | 6 Degree-of-Freedom Force-Torque Sensor based on Electromagnetic Force Compensation | - |
| dc.type | Conference | - |
| dc.citation.conferenceDate | 2023.11.12. ~ 2023.11.17. | - |
| dc.citation.conferenceName | 38th Annual Meeting of the American Society for Precision Engineering, ASPE 2023 | - |
| dc.citation.edition | Proceedings - ASPE 2023 Annual Meeting | - |
| dc.citation.endPage | 78 | - |
| dc.citation.startPage | 73 | - |
| dc.citation.title | Proceedings - ASPE 2023 Annual Meeting | - |
| dc.identifier.bibliographicCitation | Proceedings - ASPE 2023 Annual Meeting, pp.73-78 | - |
| dc.identifier.scopusid | 2-s2.0-85193685520 | - |
| dc.type.other | Conference Paper | - |
| dc.subject.subarea | Geochemistry and Petrology | - |
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