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Fabrication of WO3 Nanocone Arrays for Highly Sensitive C2H6 Gas Sensor Integrated with Low Powered in Plane Microheater
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Publication Year
2020-01-01
Journal
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher
Institute of Electrical and Electronics Engineers Inc.
Citation
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol.2020-January, pp.705-708
Keyword
C2H6 sensorIn-plane microheaterWO3 nanocone
Mesh Keyword
Cone geometryHigh sensitivityMicroheaterNanocone arraysNanostructured metalsSensor sensitivitySurface-to-volume ratioTungsten oxide
All Science Classification Codes (ASJC)
Electronic, Optical and Magnetic MaterialsCondensed Matter PhysicsMechanical EngineeringElectrical and Electronic Engineering
Abstract
The approaches of inexpensive and nanostructured metal oxide semiconductors are widely used for gas sensing. Among them, Tungsten Oxide (WO3) has attracted a lot of attentions due to its high sensitivity, structural simplicity, low cost production and high compatibility with nano-fabrication. However, thin film based planar WO3 has a limitation to enhance the sensitivity due to lower surface to volume ratio. To find improvements in sensor sensitivity and response time in terms of cone geometries and to determine optimal driving temperature for ethane (C2H6) gas sensor, hereby this paper reports, for the first time, the nanocone configured WO3 array combined with integration of low powered in-plane microheater.
ISSN
1084-6999
Language
eng
URI
https://aurora.ajou.ac.kr/handle/2018.oak/36602
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85083223528&origin=inward
DOI
https://doi.org/10.1109/mems46641.2020.9056151
Type
Conference
Funding
This research work supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) (Grant number: 20172220200110).
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Lee, Kee Keun Image
Lee, Kee Keun이기근
Department of Electrical and Computer Engineering
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