Citation Export
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Adib, Md Ridwan | - |
| dc.contributor.author | Lee, Keekeun | - |
| dc.date.issued | 2020-01-01 | - |
| dc.identifier.issn | 1084-6999 | - |
| dc.identifier.uri | https://aurora.ajou.ac.kr/handle/2018.oak/36602 | - |
| dc.identifier.uri | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85083223528&origin=inward | - |
| dc.description.abstract | The approaches of inexpensive and nanostructured metal oxide semiconductors are widely used for gas sensing. Among them, Tungsten Oxide (WO3) has attracted a lot of attentions due to its high sensitivity, structural simplicity, low cost production and high compatibility with nano-fabrication. However, thin film based planar WO3 has a limitation to enhance the sensitivity due to lower surface to volume ratio. To find improvements in sensor sensitivity and response time in terms of cone geometries and to determine optimal driving temperature for ethane (C2H6) gas sensor, hereby this paper reports, for the first time, the nanocone configured WO3 array combined with integration of low powered in-plane microheater. | - |
| dc.description.sponsorship | This research work supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) (Grant number: 20172220200110). | - |
| dc.language.iso | eng | - |
| dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
| dc.subject.mesh | Cone geometry | - |
| dc.subject.mesh | High sensitivity | - |
| dc.subject.mesh | Microheater | - |
| dc.subject.mesh | Nanocone arrays | - |
| dc.subject.mesh | Nanostructured metals | - |
| dc.subject.mesh | Sensor sensitivity | - |
| dc.subject.mesh | Surface-to-volume ratio | - |
| dc.subject.mesh | Tungsten oxide | - |
| dc.title | Fabrication of WO3 Nanocone Arrays for Highly Sensitive C2H6 Gas Sensor Integrated with Low Powered in Plane Microheater | - |
| dc.type | Conference | - |
| dc.citation.conferenceDate | 2020.1.18. ~ 2020.1.22. | - |
| dc.citation.conferenceName | 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 | - |
| dc.citation.edition | 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 | - |
| dc.citation.endPage | 708 | - |
| dc.citation.startPage | 705 | - |
| dc.citation.title | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | - |
| dc.citation.volume | 2020-January | - |
| dc.identifier.bibliographicCitation | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol.2020-January, pp.705-708 | - |
| dc.identifier.doi | 10.1109/mems46641.2020.9056151 | - |
| dc.identifier.scopusid | 2-s2.0-85083223528 | - |
| dc.subject.keyword | C2H6 sensor | - |
| dc.subject.keyword | In-plane microheater | - |
| dc.subject.keyword | WO3 nanocone | - |
| dc.type.other | Conference Paper | - |
| dc.description.isoa | false | - |
| dc.subject.subarea | Electronic, Optical and Magnetic Materials | - |
| dc.subject.subarea | Condensed Matter Physics | - |
| dc.subject.subarea | Mechanical Engineering | - |
| dc.subject.subarea | Electrical and Electronic Engineering | - |
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