In this study, we present the development and optimization of a PZT-based MEMS Fabry-Perot Interferometer (FPI) with various configurations to enhance its performance characteristics. The initial design involved a single-pole PZT configuration, which demonstrated promising results with a transmission rate exceeding 50% at a wavelength of 850 nm. However, the bonding process using Au-TiO2 presented challenges, resulting in weak bonding and the appearance of multiple peaks. Furthermore, the peak shifting capability of the PZT material was limited, and the full width at half maximum (FWHM) was relatively narrow at 20 nm. To overcome these limitations, we investigated a modified FPI design utilizing four bulky PZT poles. This configuration showed improved FWHM of 11 nm and easy fabrication process due to the absence of bonding requirements. However, the maximum transmission rate at 850 nm was reduced to 15%, resulting in high transmission loss, which posed a significant drawback. To address the transmission loss issue, we proposed a novel FPI design with double PZT poles. This configuration demonstrated a transmission rate of 20% at 850 nm, offering a moderate improvement over the previous design. While the FWHM increased to 30 nm, the innovative use of double PZT poles allowed for effective modulation of the center peak wavelength from 855 nm to 845 nm, providing fine-tuning capabilities at low voltages. The bonding process was improved using Au-Au bonding, which enhanced the overall device reliability. However, the maximum transmission rate at 850 nm remained relatively low, highlighting an area for further improvement. These findings showcase the successful development and optimization of PZT-based MEMS Fabry-Perot Interferometers with varying configurations. The results obtained from simulation and experimental analyses demonstrate good agreement and highlight the potential for future advancements in this field. Despite the remaining challenges, such as the need for improved transmission rates at the desired wavelength and reduced FWHM, the presented designs provide valuable insights for further research and development in the field of advanced MEMS-based optical devices.
