Development of PZT-based MEMS FabryPerot Interferometer with eutectic bonding and its interface electronics - TUSHER MD MUNIRUL ISLAM (The Graduate School, Ajou University, 2023)
학위논문(석사)--아주대학교 일반대학원 :전자공학과,2023. 8
Keywords: Actuator; MEMS; Photonics; Sensor