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Fabrication of Platinum Functionalized Zinc Oxide Nanorods for High-Performance Acetylene Gas Sensor Integrated with Microheater
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Publication Year
2019-06-01
Journal
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher
Institute of Electrical and Electronics Engineers Inc.
Citation
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp.1173-1176
Keyword
Acetylene sensorGas sensorMicro-heaterPt-decorated ZnOPt/ZnO
Mesh Keyword
Gas sensing materialHigh operating temperatureHigh sensitivity gas sensorLow operating temperatureMetal oxide semiconductorMicro-heatersSensing characteristicsZinc oxide nanorods
All Science Classification Codes (ASJC)
Process Chemistry and TechnologySpectroscopyElectrical and Electronic EngineeringMechanical EngineeringElectronic, Optical and Magnetic MaterialsControl and OptimizationInstrumentation
Abstract
The rapidly expanding infrastructure dictates the need for ubiquitous distributed low power, low-cost, high sensitivity gas sensor. In the past few decades, metal-oxide semiconductors have been investigated widely as gas sensing materials. However, their low sensitivity and high operating temperature (about 400-500 °C) have significant limitations. To resolve these problems, here, we report the Pt activated ZnO nanorods (NRs) as a highly sensitive material for MEMS compatible miniaturized acetylene gas sensor at low operating temperature. Further, before fabrication COMSOL simulation was performed to optimize the micro-heater design. The fabricated Pt functionalized ZnO NRs based sensor exhibits an ultrahigh response toward 1 ppm acetylene with faster response and recovery compared to state-of-the-art sensing characteristics.
Language
eng
URI
https://aurora.ajou.ac.kr/handle/2018.oak/36478
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85071955771&origin=inward
DOI
https://doi.org/10.1109/transducers.2019.8808763
Journal URL
http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=8787960
Type
Conference
Funding
This research work supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) (Grant number: 20172220200110)
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SEO, HYUNGTAK서형탁
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