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to 10 of 4008 (Search time: 0.0 seconds).
Plasma etching of SiO2 contact hole using perfluoropropyl vinyl ether and perfluoroisopropyl vinyl ether
You, Sanghyun;
Kim, Jun Hyun;
Kim, Chang Koo
2022-01-01
Korean Journal of Chemical Engineering, Vol.39, pp.63-68
Springer
Effect of the Plasma Gas Type on the Surface Characteristics of 3Y‐TZP Ceramic
oa mark
Kang, Sung Un;
Kim, Chul Ho;
Kim, Hee Kyung;
Yoon, Ye Won;
Kim, Yu Kwon
;
Kim, Seung Joo
2022-03-01
International Journal of Molecular Sciences, Vol.23
MDPI
Effect of Discharge Gas Composition on SiC Etching in an HFE-347mmy/O2/Ar Plasma
oa mark
You, Sanghyun;
Sun, Eunjae;
Chae, Heeyeop;
Kim, Chang Koo
2024-08-01
Materials, Vol.17
Multidisciplinary Digital Publishing Institute (MDPI)
New plasma etching techniques for control over Si and SiO2 etch profiles
조성운
2015-08
The Graduate School, Ajou University
A passive mitigation strategy of impurity deposition on the first mirrors using duct with baffles: A case study at a port of KSTAR with in-situ deposition monitoring
Kim, Boseong;
Seon, Changrae;
Oh, Soo Ghee;
Kim, Yu Kwon
;
An, Younghwa;
Bang, Eunnam;
Hong, Suk Ho;
Pak, Sunil;
Cheon, Munseong;
Lee, Hyun Gon
2018-04-01
Fusion Engineering and Design, Vol.129, pp.269-276
Elsevier Ltd
Sequential doping strategy in rutile TiO2 nanorod for high performance photoanode
Lee, Sang Yeon;
Lee, Young Jae;
Yoo, Il Han;
Kim, Hyeon Woo;
Song, Hyejeong;
Heo, Soo Won;
Kalanur, Shankara S.;
Mohapatra, Gourab;
Rohma,;
Ko, Hyunseok;
Seo, Hyungtak
2024-04-15
Applied Surface Science, Vol.652
Elsevier B.V.
A study on selective surface nitridation of TiO 2 nanocrystals in the afterglows of N 2 and N 2 -O 2 microwave plasmas
Jeon, Byungwook;
Kim, Ansoon;
Ricard, André;
Sarrette, Jean Philippe;
Yu, Xiaomei;
Kim, Yu Kwon
2018-02-28
Applied Surface Science, Vol.432, pp.163-169
Elsevier B.V.
Microstructural evolution and compressive properties of nanocrystalline Ti–Fe alloy fabricated via cryomilling and spark plasma sintering
Lee, Hansung;
Sharma, Ashutosh;
Ahn, Byungmin
2022-10-01
Journal of Materials Science, Vol.57, pp.18089-18100
Springer
Development of Highly Sensitive and Stable SAW-based Temperature Sensor Array and its Interface Electronics for Realtime Monitoring of Wafer Surface Temperature in Plasma Chamber
Lee, Hyunho;
Kim, Sihyeok;
Jung, Sangwon;
Lee, Keekeun
2024-05-01
Journal of Electrical Engineering and Technology, Vol.19, pp.2491-2499
Korean Institute of Electrical Engineers
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