Ajou University repository

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Showing results 1 to 10 of 448 (Search time: 0.0 seconds).

Development of Highly Sensitive and Stable SAW-based Temperature Sensor Array and its Interface Electronics for Realtime Monitoring of Wafer Surface Temperature in Plasma Chamber
  • 2024-05-01
  • Journal of Electrical Engineering and Technology, Vol.19, pp.2491-2499
  • Korean Institute of Electrical Engineers
마이크로웨이브 플라즈마 버너를 이용한 불화 가스 분해와 화학 및 생물 독가스 제독
  • 신동훈
  • 2006-08
  • The Graduate School, Ajou University
Toward Real Time Monitoring of Wafer Temperature in Plasma Chamber through Surface Acoustic Wave Resonator and Mu-Negative Metamaterial Antenna
  • 2021-09-15
  • IEEE Sensors Journal, Vol.21, pp.19863-19871
  • Institute of Electrical and Electronics Engineers Inc.
Plasma Surface Modification of 3Y-TZP at Low and Atmospheric Pressures with Different Treatment Timesoa mark
  • 2023-04-01
  • International Journal of Molecular Sciences, Vol.24
  • Multidisciplinary Digital Publishing Institute (MDPI)
마이크로웨이브 플라즈마 토치와 응용
  • Cho, Soon-Cheon
  • 2008-08
  • The Graduate School, Ajou University
Methane Disintegration by Water Vapor in a Hot Chamber heated by Using a Microwave Steam Torch
  • Choi, Chang H.;
  • Lee, Joo Y.;
  • Kim, Dong J.;
  • Woo, Sang G.;
  • Uhm, Han S.
  • 2019-09-01
  • Journal of the Korean Physical Society, Vol.75, pp.367-372
  • Korean Physical Society
Production of Hydrogen-Rich Syngas from Dimethyl Ether by Using a Microwave Steam Plasma
  • Uhm, Han S.;
  • Choi, Chang H.;
  • Lee, Joo Y.;
  • Kim, Dong J.;
  • Woo, Sang G.;
  • Woo, Minwoo;
  • Lee, Dong C.
  • 2019-09-01
  • Journal of the Korean Physical Society, Vol.75, pp.460-465
  • Korean Physical Society
Oxygen Behavior in High Temperature Plasma and its Applications to Hydrocarbon Fuels
  • Uhm, Han S.;
  • Choi, Chang H.;
  • Kim, Dong J.;
  • Lee, Joo Y.;
  • Woo, Sang G.
  • 2019-12-01
  • Journal of the Korean Physical Society, Vol.75, pp.917-923
  • Korean Physical Society
대기압 수증기 플라즈마에 의하여 촉진되는 화학반응 연구
  • 구일교
  • 2007-02
  • The Graduate School, Ajou University
Vacuum leak detection method using index regression and correction for semiconductor equipment in a vacuum chamberoa mark
  • 2021-12-01
  • Applied Sciences (Switzerland), Vol.11
  • MDPI
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