Point defects play a crucial role in determining the properties of atomically thin semiconductors. This work demonstrates the controlled formation of different types of defects and their comprehensive optical characterization using hyperspectral line imaging (HSLI). Distinct optical responses are observed in monolayer semiconductors grown under different stoichiometries using metal-organic chemical vapor deposition. HSLI enables the simultaneous measurement of 400 spectra, allowing for statistical analysis of optical signatures at close to a centimeter scale. The study discovers that chalcogen-rich samples exhibit remarkable optical uniformity due to reduced precursor accumulation compared to the metal-rich case. The utilization of HSLI as a facile and reliable characterization tool pushes the boundaries of potential applications for atomically thin semiconductors in future devices.
S.L. and T.W.K. contributed equally to this work. This work was supported by the National Research Foundation (NRF) grants funded by the Korean government (MSIT) (NRF-2020R1C1C1005963, NRF-2021R1A4A1032085, NRF- 2023R1A2C1006270, and NRF-2020R1C1C1011219) and through the Quantum Information Science Human Infrastructure Development Project (NRF-2022M3H3A1063074). This work was supported by the\u00A0G-LAMP Program (No. RS-2023-00285390) of the NRF of Korea grant funded by the Ministry of Education. This work was supported by the National Supercomputing Center with supercomputing resources including technical support (KSC-2023-CRE-0054). [Correction added on June 26, 2024, after first online publication: Figure 3 has been updated.]S.L. and T.W.K. contributed equally to this work. This work was supported by the National Research Foundation (NRF) grants funded by the Korean government (MSIT) (NRF\u20102020R1C1C1005963, NRF\u20102021R1A4A1032085, NRF\u2010 2023R1A2C1006270, and NRF\u20102020R1C1C1011219) and through the Quantum Information Science Human Infrastructure Development Project (NRF\u20102022M3H3A1063074). This work was supported by the G\u2010LAMP Program (No. RS\u20102023\u201000285390) of the NRF of Korea grant funded by the Ministry of Education. This work was supported by the National Supercomputing Center with supercomputing resources including technical support (KSC\u20102023\u2010CRE\u20100054).
