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PECVD 법에 의한 DLC 박막 중착시 생성되는 플라즈마의 OES 분석
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Advisor
진억용
Affiliation
아주대학교 일반대학원
Department
일반대학원 재료공학과
Publication Year
2000
Publisher
The Graduate School, Ajou University
Description
학위논문(석사)--아주대학교 대학원 :재료공학과,2000
Language
kor
URI
https://dspace.ajou.ac.kr/handle/2018.oak/2225
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Type
Thesis
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