Ajou University repository

Microsystem Technologies
ISSN
  • E1432-1858
  • P0946-7076
Publisher

Springer Verlag

Listed on
(Coverage)

JCR1999-2023

SJR1999-2020;2022-2023

CiteScore2011-2023

SCI2010-2019

SCIE2010-2024

CC2016-2024

SCOPUS2017-2024

Active
Active

based on the information

  • SCOPUS:2024-10
Country
GERMANY
Aime & Scopes
"Microsystem Technologies - Micro- and Nanosystems. Information Storage and Processing Systems" is intended to provide rapid publication of important and timely results on electromechanical, materials science, design, and manufacturing issues of these systems and their components. The MEMS/NEMS (Micro/NanoElectroMechanical Systems) area includes sensor, actuators and other micro/nanosystems, and micromechatronic systems integration. Information storage systems include magnetic recording, optical recording, and other recording devices, e.g., rigid disk, flexible disk, tape and card drives. Processing systems include copiers, printers, scanners and digital cameras. All contributions are of international archival quality. These are refereed by MST editors and their reviewers by rigorous journal standards. The journal covers a wide range of interdisciplinary technical areas. It brings together and cross-links the knowledge, experience, and capabilities of academic and industrial specialists in many fields. Finally, it contributes to the economically and ecologically sound production of reliable, high-performance MEMS and information storage & processing systems.
Article List

Showing results 1 to 1 of 1

Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion
  • Lee, Hak Jun;
  • Woo, Siwoong;
  • Park, Jaehyun;
  • Jeong, Jae Heon;
  • Kim, Myeonghyeon;
  • Ryu, Jiheun;
  • Gweon, Dae Gab;
  • Choi, Young Man
  • 2018-06-01
  • Microsystem Technologies, Vol.24 No.6, pp.2653-2662
  • Springer Verlag
1