The oblique angle deposition of Agwith different deposition rates and substrates was studied for surface-enhanced Raman spectroscopy (SERS) efficiency. The deposition rate for the Ag substrate with maximum SERS efficiency was optimized to 2.4 Å/s. We also analyzed the morphology of Ag nanorods deposited at the same rate on various substrates and compared their SERS intensities. Ag deposited on SiO2, sapphire, and tungsten showed straight nanorods shape and showed relatively high SERS efficiency. However, Ag deposited on graphene or plasma-treated SiO2 substrate was slightly or more aggregated (due to high surface energy) and showed low SERS efficiency.
Author Contributions: J.L. and K.M. conducted experiments Y.K. helped to analyze the data. H.K.Y. contributed to design the experiment concept. J.L., K.M., Y.K. and H.K.Y. wrote this paper together. Funding: This research was supported by the Basic Science Research Program through the National RFeusnedairnchg: FTohuisndreasteioanrcho fwKaosr seuap(pNoRrtFe)d, abnydthwe aBsafsuicn Sdceidenbcye RtheeseMaricnhi sPtrryogorfamScitehnroceu,gIhC tThe& NFautitounrael PRleasnenairncgh (NRF-2019R1A2C1006972). This research was supported by the Nano Material Technology Development Program 2019R1A2C1006972). This research was supported by the Nano Material Technology Development Program and Future Planning (2009-0082580). through the National Research Foundation of Korea (NRF), which is funded by the Ministry of Science, ICT and Conflicts of Interest: The authors declare no conflict of interest.
