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to 10 of 94 (Search time: 0.0 seconds).
Plasma etching of SiO2 contact hole using perfluoropropyl vinyl ether and perfluoroisopropyl vinyl ether
You, Sanghyun;
Kim, Jun Hyun;
Kim, Chang Koo
2022-01-01
Korean Journal of Chemical Engineering, Vol.39, pp.63-68
Springer
Plasma etching of SiO2 using heptafluoropropyl methyl ether and perfluoropropyl vinyl ether
Kim, Jun Hyun;
Park, Jin Su;
Kim, Chang Koo
2018-01-01
ECS Journal of Solid State Science and Technology, Vol.7, pp.Q218-Q221
Electrochemical Society Inc.
Etching of Si-based materials using fluorocarbon plasmas : Etch characteristics and its applications
김준현
2019-02
The Graduate School, Ajou University
Synthesis of Vinyl Sulfones via I2-mediated Alkene Sulfonylations with Thiosulfonates
Hwang, Sang Joon;
Shyam, Pranab K.;
Jang, Hye Young
2018-04-01
Bulletin of the Korean Chemical Society, Vol.39, pp.535-539
Wiley Blackwell
요오드와 사이오설포네이트를 이용한 바이닐 설폰의 합성
황상준
2019-02
The Graduate School, Ajou University
Living Cationic Ring-Opening Polymerization of Hetero Diels–Alder Adducts to Give Multifactor-Controlled and Fast-Photodegradable Vinyl Polymers
Chae, Ju Hyung;
Choi, Minyeong;
Son, Semin;
Ko, Su Min;
Lee, In Hwan
2023-08-01
Angewandte Chemie - International Edition, Vol.62
John Wiley and Sons Inc
Process modeling of syngas conversion to ethanol and acetic acid via the production of dimethyl ether and its carbonylation
Kim, Seungwoo;
Jung, Hyun Seung;
Lee, Won Bo;
Bae, Jong Wook;
Park, Myung June
2022-12-01
Korean Journal of Chemical Engineering, Vol.39, pp.3204-3213
Springer
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plasma etching
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Angular dependence
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etch selectivity
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global warming potential
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