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Showing results 1 to 10 of 1142 (Search time: 0.0 seconds).

Epitaxial growth of NbN thin films for electrodes using atomic layer deposition
  • Young Jang, Seo;
  • Min Lee, Hye;
  • Young Sung, Ju;
  • Eun Kim, Se;
  • Deock Jeon, Jae;
  • Yun, Yewon;
  • Mo Moon, Sang;
  • Eun Yoo, Joung;
  • Hyeon Choi, Ji;
  • Joo Park, Tae;
  • Woon Lee, Sang
  • 2023-11-01
  • Applied Surface Science, Vol.636
  • Elsevier B.V.
Influences of Process Temperature on a Phase of Ga2O3 Thin Films Grown by Atomic Layer Deposition on Sapphire
  • 2020-12-01
  • Bulletin of the Korean Chemical Society, Vol.41, pp.1190-1193
  • Wiley Blackwell
Microstructural, surface morphological, and magnetic properties of oblique angle deposited Co thin films on ion-beam fabricated self-organized Si substrates
  • Patel, Shiv P.;
  • Basu, T.;
  • Kumar, M.;
  • Mishra, P.;
  • Som, T.
  • 2022-02-01
  • Materials Letters, Vol.308
  • Elsevier B.V.
Alternative surface reaction route in the atomic layer deposition of NbN thin films for reduced resistivity
  • Lee, Hyeok Jae;
  • Jang, Seo Young;
  • Lee, Hye Min;
  • Sung, Ju Young;
  • Kim, Se Eun;
  • Jeon, Jae Deock;
  • Yun, Yewon;
  • Lee, Sang Woon
  • 2023-08-15
  • Journal of Alloys and Compounds, Vol.952
  • Elsevier Ltd
Toward Advanced High-k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition
  • Kim, Se Eun;
  • Sung, Ju Young;
  • Jeon, Jae Deock;
  • Jang, Seo Young;
  • Lee, Hye Min;
  • Moon, Sang Mo;
  • Kang, Jun Goo;
  • Lim, Han Jin;
  • Jung, Hyung Suk;
  • Lee, Sang Woon
  • 2023-10-24
  • Advanced Materials Technologies, Vol.8
  • John Wiley and Sons Inc
Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors
  • Lee, Yujin;
  • Seo, Seunggi;
  • Nam, Taewook;
  • Lee, Hyunho;
  • Yoon, Hwi;
  • Sun, Sangkyu;
  • Oh, Il Kwon;
  • Lee, Sanghun;
  • Shong, Bonggeun;
  • Seo, Jin Hyung;
  • Seok, Jang Hyeon;
  • Kim, Hyungjun
  • 2021-12-01
  • Applied Surface Science, Vol.568
  • Elsevier B.V.
Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review
  • Kim, Se Eun;
  • Sung, Ju Young;
  • Yun, Yewon;
  • Jeon, Byeongjun;
  • Moon, Sang Mo;
  • Lee, Han Bin;
  • Lee, Chae Hyun;
  • Jung, Hae Jun;
  • Lee, Jae Ung;
  • Lee, Sang Woon
  • 2024-08-01
  • Current Applied Physics, Vol.64, pp.8-15
  • Elsevier B.V.
Vanadium oxide thin film deposited on Si by atomic layer deposition for non-volatile resistive switching memory devices
  • 2023-12-01
  • Applied Surface Science, Vol.639
  • Elsevier B.V.
Synthesis of polycrystalline gallium oxide solar-blind ultraviolet photodetector by Aerosol Deposition
  • Jang, Han Eol;
  • Cho, Hyeon Ho;
  • Yu, Hak Ki;
  • Choi, Jae Young;
  • Park, Jae Hyuk
  • 2023-06-01
  • Journal of the European Ceramic Society, Vol.43, pp.2534-2540
  • Elsevier Ltd
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