Ajou University repository

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Showing results 1 to 10 of 1859 (Search time: 0.0 seconds).

Plasma Atomic Layer Etching of SiO2 and Si3N4 with Low Global Warming C4H3F7O Isomers
  • 2023-04-24
  • ACS Sustainable Chemistry and Engineering, Vol.11, pp.6136-6142
  • American Chemical Society
불순물들의 종류와 농도에 따른 다결정실리콘 박막의 특성
  • 우상호
  • 2008-08
  • The Graduate School, Ajou University
Quasi atomic layer etching of SiO2 using plasma fluorination for surface cleaning
  • 2018-01-01
  • Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol.36
  • AVS Science and Technology Society
Oxidative coupling of methane over Mn2O3-Na2WO4/SiC catalystsoa mark
  • 2019-04-01
  • Catalysts, Vol.9
  • MDPI
Epitaxial Ge Solar Cells Directly Grown on Si (001) by MOCVD Using Isobutylgermane
  • Kim, Youngjo;
  • Kim, Kangho;
  • Lee, Jaejin;
  • Kim, Chang Zoo;
  • Kang, Ho Kwan;
  • Park, Won Kyu
  • 2018-03-01
  • Journal of the Korean Physical Society, Vol.72, pp.633-638
  • The Korean Physical Society
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