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Design of decision support system for yield management in semiconductor industry: application to artificial intelligence
  • 2022-01-01
  • International Journal of Business Information Systems, Vol.40, pp.60-84
  • Inderscience Publishers
Evaluating effectiveness of dust by-product treatment with scrubbers to mitigate explosion risk in ZrO2 atomic layer deposition process
  • 2020-12-05
  • Journal of Hazardous Materials, Vol.400
  • Elsevier B.V.
Tracer Gas Test and CFD Analysis of Semiconductor Gas Box for Flammable Gas Leakageoa mark
  • 2022-11-01
  • Energies, Vol.15
  • MDPI
Efficient Fab facility layout with spine structure using genetic algorithm under various material-handling considerations
  • 2022-01-01
  • International Journal of Production Research, Vol.60, pp.2816-2829
  • Taylor and Francis Ltd.
Vacuum leak detection method using index regression and correction for semiconductor equipment in a vacuum chamberoa mark
  • 2021-12-01
  • Applied Sciences (Switzerland), Vol.11
  • MDPI
Graphene on Group-IV Elementary Semiconductors: The Direct Growth Approach and Its Applications
  • Lee, Jae Hyun;
  • Kang, Seog Gyun;
  • Jang, Hyeon Sik;
  • Moon, Ji Yun;
  • Whang, Dongmok
  • 2019-08-01
  • Advanced Materials, Vol.31
  • Wiley-VCH Verlag
Gas Box Exhaust Design Modification for Accidental Hazardous Gas Releases in Semiconductor Industryoa mark
  • 2024-11-01
  • Processes, Vol.12
  • Multidisciplinary Digital Publishing Institute (MDPI)
An Eco-Friendly, CMOS-Compatible Transfer Process for Large-Scale CVD-Graphene
  • Moon, Ji Yun;
  • Kim, Seung Il;
  • Son, Seok Kyun;
  • Kang, Seog Gyun;
  • Lim, Jae Young;
  • Lee, Dong Kyu;
  • Ahn, Byungmin;
  • Whang, Dongmok;
  • Yu, Hak Ki;
  • Lee, Jae Hyun
  • 2019-07-09
  • Advanced Materials Interfaces, Vol.6
  • Wiley-VCH Verlag
Fault Detection with Index Regression Correction and Variational Smoothing for Semiconductor Equipment Sensor Signal
  • 하태경
  • 2022-02
  • The Graduate School, Ajou University
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