Ajou University repository

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Showing results 1 to 10 of 1215 (Search time: 0.0 seconds).

Optical Vibration Sensor Module Based on Beating Principle for Monitoring of Semiconductor Manufacturing Equipment
  • 2024-09-01
  • International Journal of Precision Engineering and Manufacturing, Vol.25, pp.1917-1924
  • SpringerOpen
Vacuum leak detection method using index regression and correction for semiconductor equipment in a vacuum chamberoa mark
  • 2021-12-01
  • Applied Sciences (Switzerland), Vol.11
  • MDPI
Tracer Gas Test and CFD Analysis of Semiconductor Gas Box for Flammable Gas Leakageoa mark
  • 2022-11-01
  • Energies, Vol.15
  • MDPI
Gas Box Exhaust Design Modification for Accidental Hazardous Gas Releases in Semiconductor Industryoa mark
  • 2024-11-01
  • Processes, Vol.12
  • Multidisciplinary Digital Publishing Institute (MDPI)
Virtual commissioning for an Overhead Hoist Transporter in a semiconductor FAB
  • 2020-11-16
  • International Journal of Production Research, Vol.58, pp.6890-6898
  • Taylor and Francis Ltd.
Fault Detection with Index Regression Correction and Variational Smoothing for Semiconductor Equipment Sensor Signal
  • 하태경
  • 2022-02
  • The Graduate School, Ajou University
반도체 장비 제조업에서의 작업 공정 효율화에 대한 연구
  • 임송빈
  • 2017-02
  • The Graduate School, Ajou University
협력업체 작업자 레벨 관리를 통한 품질 향상 방법 개발
  • 조규보
  • 2018-08
  • The Graduate School, Ajou University
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