Ajou University repository

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Optical Vibration Sensor Module Based on Beating Principle for Monitoring of Semiconductor Manufacturing Equipment
  • 2024-09-01
  • International Journal of Precision Engineering and Manufacturing, Vol.25, pp.1917-1924
  • SpringerOpen
Efficient Fab facility layout with spine structure using genetic algorithm under various material-handling considerations
  • 2022-01-01
  • International Journal of Production Research, Vol.60, pp.2816-2829
  • Taylor and Francis Ltd.
Tracer Gas Test and CFD Analysis of Semiconductor Gas Box for Flammable Gas Leakageoa mark
  • 2022-11-01
  • Energies, Vol.15
  • MDPI
Design of decision support system for yield management in semiconductor industry: application to artificial intelligence
  • 2022-01-01
  • International Journal of Business Information Systems, Vol.40, pp.60-84
  • Inderscience Publishers
Evaluating effectiveness of dust by-product treatment with scrubbers to mitigate explosion risk in ZrO2 atomic layer deposition process
  • 2020-12-05
  • Journal of Hazardous Materials, Vol.400
  • Elsevier B.V.
Graphene on Group-IV Elementary Semiconductors: The Direct Growth Approach and Its Applications
  • Lee, Jae Hyun;
  • Kang, Seog Gyun;
  • Jang, Hyeon Sik;
  • Moon, Ji Yun;
  • Whang, Dongmok
  • 2019-08-01
  • Advanced Materials, Vol.31
  • Wiley-VCH Verlag
Gas Box Exhaust Design Modification for Accidental Hazardous Gas Releases in Semiconductor Industryoa mark
  • 2024-11-01
  • Processes, Vol.12
  • Multidisciplinary Digital Publishing Institute (MDPI)
Vacuum leak detection method using index regression and correction for semiconductor equipment in a vacuum chamberoa mark
  • 2021-12-01
  • Applied Sciences (Switzerland), Vol.11
  • MDPI
FAB내 물류 자동화 시스템의 유휴 차량 운영 및 차량 디스패칭
  • 양현
  • 2023-02
  • The Graduate School, Ajou University
Virtual commissioning for an Overhead Hoist Transporter in a semiconductor FAB
  • 2020-11-16
  • International Journal of Production Research, Vol.58, pp.6890-6898
  • Taylor and Francis Ltd.
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