Ajou University repository

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Toward Real Time Monitoring of Wafer Temperature in Plasma Chamber through Surface Acoustic Wave Resonator and Mu-Negative Metamaterial Antenna
  • 2021-09-15
  • IEEE Sensors Journal, Vol.21, pp.19863-19871
  • Institute of Electrical and Electronics Engineers Inc.
Development of chipless and wireless underground temperature sensor system based on magnetic antennas and SAW sensor
  • 2019-10-01
  • Sensors and Actuators, A: Physical, Vol.297
  • Elsevier B.V.
Development of a highly sensitive and portable particulate matter SAW sensor and interface electronics
  • 2022-08-16
  • Sensors and Actuators A: Physical, Vol.343
  • Elsevier B.V.
Driving of underground SAW temperature sensor system using magnetic energy and its wireless measurement system development
  • 2019-01-01
  • Transactions of the Korean Institute of Electrical Engineers, Vol.68, pp.1129-1136
  • Korean Institute of Electrical Engineers
Development of underground wireless SAW integrated sensor measurement system using magnetic field
  • 2020-06-01
  • Transactions of the Korean Institute of Electrical Engineers, Vol.69, pp.903-913
  • Korean Institute of Electrical Engineers
Development of Highly Sensitive and Stable SAW-based Temperature Sensor Array and its Interface Electronics for Realtime Monitoring of Wafer Surface Temperature in Plasma Chamber
  • 2024-05-01
  • Journal of Electrical Engineering and Technology, Vol.19, pp.2491-2499
  • Korean Institute of Electrical Engineers
ARM11 기반의 SAW Sensor 리더 플랫폼에 관한 연구
  • 유호준
  • 2008-02
  • The Graduate School, Ajou University
주파수 샘플링 방식의 표면 탄성파 송수신 플랫폼 설계
  • 조율희
  • 2013-02
  • The Graduate School, Ajou University
Cortex-M3를 이용한 SAW Device Reader Platform 구현에 관한 연구
  • 정용현
  • 2011-08
  • The Graduate School, Ajou University
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