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Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors
  • Lee, Yujin;
  • Seo, Seunggi;
  • Nam, Taewook;
  • Lee, Hyunho;
  • Yoon, Hwi;
  • Sun, Sangkyu;
  • Oh, Il Kwon;
  • Lee, Sanghun;
  • Shong, Bonggeun;
  • Seo, Jin Hyung;
  • Seok, Jang Hyeon;
  • Kim, Hyungjun
  • 2021-12-01
  • Applied Surface Science, Vol.568
  • Elsevier B.V.
Enhanced temperature coefficient of resistance of VOX-based uncooled microbolometers manufactured by plasma enhanced atomic layer deposition
  • Kim, Unjeong;
  • Kim, Dukhwan;
  • Lim, Seokwon;
  • Jeon, Yerin;
  • Kim, Jisu;
  • Lee, Jinchan;
  • Kim, Junmo;
  • Thai Duy, Le;
  • Seo, Hyungtak
  • 2024-02-01
  • Applied Surface Science, Vol.645
  • Elsevier B.V.
Plasma-Enhanced Atomic Layer Deposition Assisted Low-Temperature Synthetic Routes to Rationally Designed Metastable c-Axis Aligned Hexagonal In-Zn-O
  • Hong, Tae Hyun;
  • Kim, Hyeon Woo;
  • Kim, Yoon Seo;
  • Jeong, Hyun Jun;
  • Cho, Sung Beom;
  • Park, Jin Seong
  • 2023-07-11
  • Chemistry of Materials, Vol.35, pp.5168-5176
  • American Chemical Society
Effects of plasma power on ferroelectric properties of HfO2-ZrO2 nanolaminates produced by plasma enhanced atomic layer deposition
  • 2023-04-01
  • Surfaces and Interfaces, Vol.37
  • Elsevier B.V.
Dysprosium Incorporation for Phase Stabilization of Atomic-Layer-Deposited HfO2 Thin Films
  • Lee, Yujin;
  • Kim, Kangsik;
  • Lee, Zonghoon;
  • Lee, Hong Sub;
  • Lee, Han Bo Ram;
  • Kim, Woo Hee;
  • Oh, Il Kwon;
  • Kim, Hyungjun
  • 2023-03-28
  • Chemistry of Materials, Vol.35, pp.2312-2320
  • American Chemical Society
Epitaxial growth of NbN thin films for electrodes using atomic layer deposition
  • Young Jang, Seo;
  • Min Lee, Hye;
  • Young Sung, Ju;
  • Eun Kim, Se;
  • Deock Jeon, Jae;
  • Yun, Yewon;
  • Mo Moon, Sang;
  • Eun Yoo, Joung;
  • Hyeon Choi, Ji;
  • Joo Park, Tae;
  • Woon Lee, Sang
  • 2023-11-01
  • Applied Surface Science, Vol.636
  • Elsevier B.V.
O2 Plasma을 이용한 ALD SEAM 제어 식각 방법
  • 최호진
  • 2023-02
  • The Graduate School, Ajou University
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