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Toward Real Time Monitoring of Wafer Temperature in Plasma Chamber through Surface Acoustic Wave Resonator and Mu-Negative Metamaterial Antenna
  • 2021-09-15
  • IEEE Sensors Journal, Vol.21, pp.19863-19871
  • Institute of Electrical and Electronics Engineers Inc.
Mode conversion of extraordinary waves in stratified plasmas with an external magnetic field perpendicular to the directions of inhomogeneity and wave propagation
  • 2021-10-01
  • Journal of the Korean Physical Society, Vol.79, pp.717-724
  • Korean Physical Society
Quasi atomic layer etching of SiO2 using plasma fluorination for surface cleaning
  • 2018-01-01
  • Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol.36
  • AVS Science and Technology Society
Giant overreflection of magnetohydrodynamic waves from inhomogeneous plasmas with nonuniform shear flowsoa mark
  • 2022-12-01
  • Physics of Fluids, Vol.34
  • American Institute of Physics Inc.
Resonance characteristics of THz metamaterials based on a drude metal with finite permittivity
  • 2018-01-01
  • Current Optics and Photonics, Vol.2, pp.378-382
  • Optical Society of Korea
Development of Highly Sensitive and Stable SAW-based Temperature Sensor Array and its Interface Electronics for Realtime Monitoring of Wafer Surface Temperature in Plasma Chamber
  • 2024-05-01
  • Journal of Electrical Engineering and Technology, Vol.19, pp.2491-2499
  • Korean Institute of Electrical Engineers
Effects of plasma power on ferroelectric properties of HfO2-ZrO2 nanolaminates produced by plasma enhanced atomic layer deposition
  • 2023-04-01
  • Surfaces and Interfaces, Vol.37
  • Elsevier B.V.
대기압 아르곤 플라즈마 제트의 전기방전 특성과 Bacillus subtilis endospore 제거의 응용
  • 임진표
  • 2007-02
  • The Graduate School, Ajou University
불균일한 플라스마 및 메타물질에서의 모드변환: 불변 끼워넣기 이론의 적용
  • YU, Dae Jung
  • 2012-02
  • The Graduate School, Ajou University
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