Ajou University repository

  • Add filters:
  • Results/Page
  • Sort by
  • In order
  • Authors/record

Showing results 1 to 3 of 3 (Search time: 0.0 seconds).

Reaction mechanism and film properties of the atomic layer deposition of ZrO2 thin films with a heteroleptic CpZr(N(CH3)2)3 precursor
  • Choi, Ae Rim;
  • Seo, Seunggi;
  • Kim, Seiyon;
  • Kim, Dohee;
  • Ryu, Seung Wook;
  • Lee, Woo Jae;
  • Oh, Il Kwon
  • 2023-07-01
  • Applied Surface Science, Vol.624
  • Elsevier B.V.
Role of a cyclopentadienyl ligand in a heteroleptic alkoxide precursor in atomic layer deposition
  • Yoon, Hwi;
  • Lee, Yujin;
  • Lee, Ga Yeon;
  • Seo, Seunggi;
  • Park, Bo Keun;
  • Chung, Taek Mo;
  • Oh, Il Kwon;
  • Kim, Hyungjun
  • 2024-01-14
  • Journal of Chemical Physics, Vol.160
  • American Institute of Physics Inc.
1

Discover