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to 10 of 20454 (Search time: 0.0 seconds).
Enhanced nucleation and growth of HfO2 thin films grown by atomic layer deposition on graphene
Kim, Soo Bin;
Ahn, Yeong Hwan
;
Park, Ji Yong
;
Lee, Sang Woon
2018-04-25
Journal of Alloys and Compounds, Vol.742, pp.676-682
Elsevier Ltd
Graded crystalline HfO gate dielectric layer for high-k/Ge MOS gate stack
oa mark
Lee, Chan Ho;
Yang, Jeong Yong;
Heo, Junseok
;
Yoo, Geonwook
2021-01-01
IEEE Journal of the Electron Devices Society, Vol.9, pp.295-299
Institute of Electrical and Electronics Engineers Inc.
강유전성 기반 메모리 소자 제작을 위한 플라즈마 원자층 증착법 기반의 HfO₂-ZrO₂ Nanolaminates 제조 및 특성 평가 연구
안영환
2023-02
The Graduate School, Ajou University
열처리 공정과 기판 구조에 따른 RF Sputtering 기반 HfO2 박막의 강유전성 및 전기적 특성 분석
임석원
2023-08
The Graduate School, Ajou University
알루미늄 함량과 급속 열처리 온도에 따른 하프늄-알루미늄 산화막 커패시터의 강유전성 연구
구화영
2020-02
The Graduate School, Ajou University
Dysprosium Incorporation for Phase Stabilization of Atomic-Layer-Deposited HfO2 Thin Films
Lee, Yujin;
Kim, Kangsik;
Lee, Zonghoon;
Lee, Hong Sub;
Lee, Han Bo Ram;
Kim, Woo Hee;
Oh, Il Kwon
;
Kim, Hyungjun
2023-03-28
Chemistry of Materials, Vol.35, pp.2312-2320
American Chemical Society
Low subthreshold slope AlGaN/GaN MOS-HEMT with spike-annealed HfO2 gate dielectric
oa mark
Yeom, Min Jae;
Yang, Jeong Yong;
Lee, Chan Ho;
Heo, Junseok
;
Chung, Roy Byung Kyu;
Yoo, Geonwook
2021-12-01
Micromachines, Vol.12
MDPI
Area-Selective Atomic Layer Deposition for Resistive Random-Access Memory Devices
Oh, Il Kwon
;
Khan, Asir Intisar;
Qin, Shengjun;
Lee, Yujin;
Wong, H. S.Philip;
Pop, Eric;
Bent, Stacey F.
2023-09-13
ACS Applied Materials and Interfaces, Vol.15, pp.43087-43093
American Chemical Society
O2 Plasma을 이용한 ALD SEAM 제어 식각 방법
최호진
2023-02
The Graduate School, Ajou University
Role of a cyclopentadienyl ligand in a heteroleptic alkoxide precursor in atomic layer deposition
Yoon, Hwi;
Lee, Yujin;
Lee, Ga Yeon;
Seo, Seunggi;
Park, Bo Keun;
Chung, Taek Mo;
Oh, Il Kwon
;
Kim, Hyungjun
2024-01-14
Journal of Chemical Physics, Vol.160
American Institute of Physics Inc.
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