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GaN 박막 성장에서 광 간섭계를 이용한 실시간 두께측정
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Advisor
이해영
Affiliation
아주대학교 산업대학원
Department
산업대학원 정보전자공학과
Publication Year
2001
Publisher
The Graduate School, Ajou University
Description
학위논문(석사)--아주대학교 산업대학원 :정보전자공학과,2001
Language
kor
URI
https://dspace.ajou.ac.kr/handle/2018.oak/4023
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Type
Thesis
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