In this study, Bi2O2Se microstructures was successfully synthesized using single-zone Chemical Vapor Deposition (CVD) method, and their performance as an oxygen gas sensor was evaluated. The Bi2O2Se sensor exhibited excellent sensitivity and selectivity to oxygen gas and demonstrated linearity in the range of 10–100 ppm and immune to humidity, confirming its suitability as a trace oxygen sensor. The 1-step synthesis process using single-zone CVD provides a simple and efficient approach for developing high-performance oxygen gas sensors. These results emphasize the potential of Bi2O2Se-based sensors in various gas detection applications.
This work was supported by the National Research Foundation of Korea ( NRF ) grant funded by the Korea government ( MSIT ) (No. RS-2023-00208311 , 2021R1A4A1031357 ) and partially supported by the Ajou University research fund.
