Nondestructive nano-characterization methods were reviewed with respect to technical aspect and practicability. Micro-photoluminescence, cathodoluminscence and Raman spectroscopy with mapping modes were investigated as optical characterization tools, while electron backscatter diffraction and piezoresponse force microscopy were introduced as monitoring techniques for the crystallographic and electromechanical properties. Especially, the spatial resolution of the data acquisition and analysis was carefully inspected in the representative semiconducting nanomaterial systems. Some of efforts to overcome the limit of these characterizations were also taken into consideration.
H.-W.S. acknowledges the support of the National Research Foundation (NRF) grants funded by the Korean government (2020R1F1A10766151) J.-U.L. acknowledges the support of the NRF grants funded by the Korean government (MSIT) (2020R1C1C1005963, 2020M3H3A1100938, 2021R1A4A1032085). C.-H.Y. also acknowledges the support of the NRF grants funded by the Korean Government via the Creative Research Initiative Center for Lattice Defectronics (2017R1A3B1023686)H.-W.S. acknowledges the support of the National Research Foundation (NRF) grants funded by the Korean government (2020R1F1A10766151) J.-U.L. acknowledges the support of the NRF grants funded by the Korean government (MSIT) (2020R1C1C1005963, 2020M3H3A1100938, 2021R1A4A1032085). C.-H.Y. also acknowledges the support of the NRF grants funded by the Korean Government via the Creative Research Initiative Center for Lattice Defectronics (2017R1A3B1023686)
