New plasma etching techniques for control over Si and SiO2 etch profiles - 조성운 (The Graduate School, Ajou University, 2015)
학위논문(박사)--아주대학교 일반대학원 :에너지시스템학과,2015. 8
Keywords: Plasma etching; Advanced cyclic etching; Etch profile; Slanted plasma etching