HRS로 MEMS실장된 주름진 병렬형 브리지를 갖는 저구동전압 RF-MEMS 스위치 - 송요탁 (The Graduate School, Ajou University, 2006)
학위논문(박사)--아주대학교 일반대학원 :전자공학과,2006. 8
Keywords: Low-actuation voltage; RF-MEMS+Capacitive shunt switch; Microwave and millimeter-wave; Corrugated bridge; Residual stress; HRS MEMS package+Self-alignment