Fault Detection with Index Regression Correction and Variational Smoothing for Semiconductor Equipment Sensor Signal - 하태경 (The Graduate School, Ajou University, 2022)
학위논문(박사)--아주대학교 일반대학원 :산업공학과,2022. 2
Keywords: Fault detection; Index regression; Semiconductor; Sensor signal; Variational smoothing