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Low-temperature n-type doping of insulating ultrathin amorphous indium oxide using H plasma-assisted annealing
  • Seo, Hojun;
  • Lee, Sang Yeon;
  • Lee, Jeongsu;
  • Kim, Sunjin;
  • Sul, Onejae;
  • Seo, Hyungtak;
  • Lee, Seung Beck
  • 2022-05-14
  • Nanotechnology, Vol.33 No.20
  • IOP Publishing Ltd
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