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Atomic Layer Deposition of Titanium Silicate for Multi-Patterning Process
  • Lee, Sanghun;
  • Seo, Seunggi;
  • Noh, Wontae;
  • Oh, Il Kwon;
  • Kim, Hyungjun
  • 2021-07-06
  • 2021 IEEE International Interconnect Technology Conference, IITC 2021
  • Institute of Electrical and Electronics Engineers Inc.
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