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Kinetically Stabilized Hafnia Ferroelectric of Al-Doped HfO2 Film by Fast Ramping and Fast Cooling Process- Zhang, Lingwei;
- Kim, Giuk;
- Lee, Sangho;
- Shin, Hunbeom;
- Lim, Youngjin;
- Kim, Kang;
- Oh, Il Kwon;
- Ko Park, Sang Hee;
- Ahn, Jinho;
- Jeon, Sanghun
- 2024-01-01
- IEEE Transactions on Electron Devices, Vol.71 No.12, pp.7398-7404
- Institute of Electrical and Electronics Engineers Inc.
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