Showing results 1 to 6 of 6
Design and control of a 3-DOF reaction force compensation mechanism for precision stages- Kim, Hyo Young;
- Seo, Chang Hoon;
- Lee, Moon G.;
- Jo, Jae Hoon;
- Kim, Tae Gon;
- Kim, Cheol Ho;
- Lee, Seok Woo
- 2018-01-01
- European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018, pp.197-198
- euspen
1