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Showing results 1 to 4 of 4
Alternative surface reaction route in the atomic layer deposition of NbN thin films for reduced resistivity
Lee, Hyeok Jae;
Jang, Seo Young;
Lee, Hye Min;
Sung, Ju Young;
Kim, Se Eun;
Jeon, Jae Deock;
Yun, Yewon;
Lee, Sang Woon
2023-08-15
Journal of Alloys and Compounds, Vol.952
Elsevier Ltd
Alternative Surface Reaction Route in the Atomic Layer Deposition of Titanium Nitride Thin Films for Electrode Applications
Lee, Hyeok Jae;
Hwang, Jin Ha;
Park, Ji Yong
;
Lee, Sang Woon
2021-02-23
ACS Applied Electronic Materials, Vol.3 No.2, pp.999-1005
American Chemical Society
Amorphous gallium oxide thin film grown by atomic layer deposition for high-performance and flexible deep-ultraviolet photodetector
oa mark
Lee, Kang Min;
Kim, Se Eun;
Lee, Hyeok Jae;
Lee, Sang Woon
2019-01-01
Proceedings of the World Congress on New Technologies
Avestia Publishing
Atomic layer deposition of High-k films on graphene surface
oa mark
Lee, Hyeok Jae;
Lee, Kang Min;
Lee, Sang Woon
2019-01-01
Proceedings of the World Congress on New Technologies
Avestia Publishing
1
