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Browsing by Author : Lee, Hye Min

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Alternative surface reaction route in the atomic layer deposition of NbN thin films for reduced resistivity
  • Lee, Hyeok Jae;
  • Jang, Seo Young;
  • Lee, Hye Min;
  • Sung, Ju Young;
  • Kim, Se Eun;
  • Jeon, Jae Deock;
  • Yun, Yewon;
  • Lee, Sang Woon
  • 2023-08-15
  • Journal of Alloys and Compounds, Vol.952
  • Elsevier Ltd
Toward Advanced High-k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition
  • Kim, Se Eun;
  • Sung, Ju Young;
  • Jeon, Jae Deock;
  • Jang, Seo Young;
  • Lee, Hye Min;
  • Moon, Sang Mo;
  • Kang, Jun Goo;
  • Lim, Han Jin;
  • Jung, Hyung Suk;
  • Lee, Sang Woon
  • 2023-10-24
  • Advanced Materials Technologies, Vol.8 No.20
  • John Wiley and Sons Inc
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