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Dysprosium Incorporation for Phase Stabilization of Atomic-Layer-Deposited HfO2 Thin Films- Lee, Yujin;
- Kim, Kangsik;
- Lee, Zonghoon;
- Lee, Hong Sub;
- Lee, Han Bo Ram;
- Kim, Woo Hee;
- Oh, Il Kwon;
- Kim, Hyungjun
- 2023-03-28
- Chemistry of Materials, Vol.35 No.6, pp.2312-2320
- American Chemical Society
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