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Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review- Kim, Se Eun;
- Sung, Ju Young;
- Yun, Yewon;
- Jeon, Byeongjun;
- Moon, Sang Mo;
- Lee, Han Bin;
- Lee, Chae Hyun;
- Jung, Hae Jun;
- Lee, Jae Ung;
- Lee, Sang Woon
- 2024-08-01
- Current Applied Physics, Vol.64, pp.8-15
- Elsevier B.V.
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