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Design of a Compact Broadband Vector Network Analyzer to Diagnose a Semiconductor Process Chamber
  • Kim, Seong Jin;
  • Jung, Heechul;
  • Yu, Jong Won;
  • Kim, Jeong Wook;
  • Kim, Hanam;
  • Lee, Sang Won
  • 2024-01-01
  • IEEE Transactions on Instrumentation and Measurement
  • Institute of Electrical and Electronics Engineers Inc.
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