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Epitaxial growth of NbN thin films for electrodes using atomic layer deposition- Young Jang, Seo;
- Min Lee, Hye;
- Young Sung, Ju;
- Eun Kim, Se;
- Deock Jeon, Jae;
- Yun, Yewon;
- Mo Moon, Sang;
- Eun Yoo, Joung;
- Hyeon Choi, Ji;
- Joo Park, Tae;
et al
- 2023-11-01
- Applied Surface Science, Vol.636
- Elsevier B.V.
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