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Rapid and Reliable Formation of Highly Densified Bilayer Oxide Dielectrics on Silicon Substrates via DUV Photoactivation for Low-Voltage Solution-Processed Oxide Thin-Film Transistors
  • Lee, Won June;
  • Choi, Jun Gyu;
  • Sung, Sujin;
  • Kim, Chang Hyun;
  • Na, Sekwon;
  • Joo, Young Chang;
  • Park, Sungjun;
  • Yoon, Myung Han
  • 2021-01-20
  • ACS Applied Materials and Interfaces, Vol.13 No.2, pp.2820-2828
  • American Chemical Society
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